Comb-drive actuators for large displacements
نویسندگان
چکیده
منابع مشابه
Note: an asymmetric flexure mechanism for comb-drive actuators.
This Note presents a new asymmetric flexure design, the double parallelogram-tilted-beam double parallelogram (DP-TDP) flexure, that enables two times higher stroke in electrostatic comb-drive actuators, compared to the traditional symmetrically paired double parallelogram (DP-DP) flexure, while maintaining the same device footprint. Because of its unique kinematic configuration, the DP-TDP fle...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 1996
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/6/3/004